کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
543035 871618 2011 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Modeling, design and fabrication of a freestanding nanoporous membrane
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Modeling, design and fabrication of a freestanding nanoporous membrane
چکیده انگلیسی

Nanoporous membranes are widely researched on many application fronts. One challenge for nanoporous membrane research is to provide mechanically stable designs due to inherently weak strength from diminished dimensions. We present a mathematical model that predicts the deflection behavior and strength of nanoporous membranes. Based on these mathematic predictions, we fabricated a nanoporous membrane based on a hierarchical design using microfabrication techniques. Direct force measurement with an atomic force microscope shows that the model accurately predicts the deflection behavior of the fabricated nanoporous membrane.

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ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 88, Issue 11, November 2011, Pages 3219–3223
نویسندگان
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