کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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543043 | 871618 | 2011 | 6 صفحه PDF | دانلود رایگان |

In this paper we present different devices, working as hydrogen sensors, based on single palladium nanowire and realized combining focused ion beam and dielectrophoresis techniques. The combination of these two techniques consists in the employ of focused ion beam for electrode patterning onto silicon/silicon dioxide substrates, followed by the assembly of a single palladium nanowire applying between electrodes an electric field at fixed frequency (dielectrophoresis) to a palladium nanoparticles solution. The nanowire morphology can be branched or not, depending on the applied frequency value. The devices are characterized in hydrogen environment at room temperature and their responses are compared.
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Journal: Microelectronic Engineering - Volume 88, Issue 11, November 2011, Pages 3261–3266