کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
543307 871649 2009 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Bimorph nano actuators synthesized by focused ion beam chemical vapor deposition
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Bimorph nano actuators synthesized by focused ion beam chemical vapor deposition
چکیده انگلیسی

Bimorph nano actuators synthesized by a two-layer focused ion beam (FIB) chemical vapor deposition (CVD) process have been demonstrated. The core bimorph segment of the actuator is a column structure made of two 200-nm thick tungsten-based-conductor (TBC) and diamond-like-carbon (DLC) layers. Several segments can be connected together of different angles to construct actuators with various moving capabilities when joule heating is applied via silicon MEMS (Microelectromechanical System) heater as the actuation source. Experimentally, a prototype five-segment actuator has shown projection displacement of 600 ± 60 nm under an input power of 1.02 W (160 mA and 6.41 V). The actuator has been repeatedly operated for over 100 times without any indication of degradation. As such, this work represents a new class of nano actuators based on versatile and flexible FIB-CVD bimorph nanostructures.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 86, Issue 11, November 2009, Pages 2364–2368
نویسندگان
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