کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
543705 1450396 2008 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Analysis of the filling behaviour of trenches via air bubble tracking
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Analysis of the filling behaviour of trenches via air bubble tracking
چکیده انگلیسی

Imprint of thin PDMS layers with undercut trenches features a behaviour different from the one known from binary structures. In order to compare the filling behaviour of such geometries a moulding process with preheated masters was performed. Due to the temperature accelerated curing of the reactive mixture this method enabled the identification of different filling states by ‘freezing’ of an incomplete filling situation. The different filling states could be discerned by means of the final location of the ‘frozen’ air bubbles and the filling length of the trenches. It turned out that, in contrast to the behaviour of binary trenches, the filling of undercut trenches proceeds primarily in lateral direction along the trench. This behaviour could be understood by pinning of the contact line between liquid and solid at outer edges.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 85, Issues 5–6, May–June 2008, Pages 881–885
نویسندگان
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