کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
544229 1450371 2013 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Superlens imaging lithography for high aspect ratio sub-wavelength pattern employing trilayer resist process
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Superlens imaging lithography for high aspect ratio sub-wavelength pattern employing trilayer resist process
چکیده انگلیسی


• A scheme of superlens imaging lithography employing tri-layer resist process was investigated.
• The effect of air gap between the object and the photosensitive layer on the exposure depth was analysed.
• The resist thicknesses and dry-etching parameters of the tri-layer resist process were optimised.
• A high aspect ratio structure with half pitch of 110 nm and depth of 400 nm was achieved.

Recently, superlens imaging lithography below the diffraction limit has been experimentally verified. However, the short exposure depth owing to the near-field attribute of this method restricts its practical application. A tri-layer resist process, which increases the pattern depth through two-step dry etching, can overcome this drawback. In this paper, we investigated the scheme of superlens imaging lithography employing a tri-layer resist process and analysed the effect of the air gap between the object and the photosensitive layer on the exposure depth by finite-difference time-domain analyses. Through optimising the three layer resist thicknesses and dry-etching parameters of the tri-layer resist process, we patterned a high aspect ratio structure with half pitch of 110 nm and depth of 400 nm in our experiment.

Figure optionsDownload as PowerPoint slide

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 110, October 2013, Pages 35–39
نویسندگان
, , , ,