Functional oxide nanostructures written by EBL on insulating single crystal substrates

Ordered arrays of crystalline complex oxides nanostructures are synthesized onto single crystal insulating substrates using a polyvinyl alcohol based electron beam resist precursor. The irradiated zones are insoluble in water (negative-tone resist) due to the electron induced cross linking. The high temperature treatment of the developed precursor samples leads to the formation of ordered arrays of nanodots for low irradiation doses and to the growth of epitaxially oriented nanowires for high irradiation dosages. A local characterization of the generated pattern is performed by atomic force microscopy and high resolution TEM.

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► Electron sensitive resist consisting of metal nitrates, water and polyvinyl alcohol.
► Epitaxial thin films of the ferromagnet La0.7Sr0.3MnO3 on LaAlO3, YSZ and SrTiO3.
► Single crystalline epitaxial nanodots generated by EBL on insulating substrates.
► Epitaxial oxide nanowires generated by EBL at high electron dosages.