Linear inductive antenna design for large area flat panel display plasma processing

Two different internal-type linear inductive antenna arrangements, that is, parallel and anti-parallel antenna arrangements having different current directions between adjacent antennas were investigated for a large area plasma source having the size of 1020 mm × 830 mm. The electric field profile and plasma density of Ar calculated by the F2L code showed consistent results with the experimental results on the plasma density and processing results. The results showed that the anti-parallel antenna arrangement showed better plasma uniformity compared to the parallel antenna arrangement due to the destructive Ez-field between adjacent antennas even though the destructive Ez-field decreases the plasma density at the center of the chamber.

Schematic diagrams of antenna, normalized Ion saturation current profile measured Ez-field profile, and Ar+ density profile using Langmuir probe.Figure optionsDownload as PowerPoint slide