کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5489303 | 1524354 | 2017 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Influence of homo-buffer layers and post-deposition rapid thermal annealing upon atomic layer deposition grown ZnO at 100 °C with three-pulsed precursors per growth cycle
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
ZnO main epilayers are deposited with three-pulsed precursors in every growth cycle at 100 °C on various thicknesses of 300 °C-grown homo-buffer layers by atomic layer deposition (ALD) on sapphire substrate. Samples are treated without and with post-deposition rapid thermal annealing (RTA). Two different annealing temperatures 300 and 1000 °C are utilized in the ambience of oxygen for 5 min. Extremely low background electron concentration 8.4 Ã 1014 cmâ3, high electron mobility 62.1 cm2/V s, and pronounced enhancement of near bandgap edge photoluminescence (PL) are achieved for ZnO main epilayer with sufficient thickness of buffer layer (200 ALD cycles) and post-deposition RTA at 1000 °C. Effective block and remove of thermally unstable mobile defects and other crystal lattice imperfections are the agents of quality promotion of ZnO thin film.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 475, 1 October 2017, Pages 39-43
Journal: Journal of Crystal Growth - Volume 475, 1 October 2017, Pages 39-43
نویسندگان
Yung-Chen Cheng, Kai-Yun Yuan, Miin-Jang Chen,