کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5489841 | 1524373 | 2016 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Growth of free-standing bulk wurtzite AlxGa1âxN layers by molecular beam epitaxy using a highly efficient RF plasma source
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Growth of free-standing bulk wurtzite AlxGa1âxN layers by molecular beam epitaxy using a highly efficient RF plasma source Growth of free-standing bulk wurtzite AlxGa1âxN layers by molecular beam epitaxy using a highly efficient RF plasma source](/preview/png/5489841.png)
چکیده انگلیسی
The recent development of group III nitrides allows researchers world-wide to consider AlGaN based light emitting diodes as a possible new alternative deep ultra-violet light source for surface decontamination and water purification. In this paper we will describe our recent results on plasma-assisted molecular beam epitaxy (PA-MBE) growth of free-standing wurtzite AlxGa1âxN bulk crystals using the latest model of Riber's highly efficient nitrogen RF plasma source. We have achieved AlGaN growth rates up to 3 µm/h. Wurtzite AlxGa1âxN layers with thicknesses up to 100 μm were successfully grown by PA-MBE on 2-inch and 3-inch GaAs (111)B substrates. After growth the GaAs was subsequently removed using a chemical etch to achieve free-standing AlxGa1âxN wafers. Free-standing bulk AlxGa1âxN wafers with thicknesses in the range 30-100 μm may be used as substrates for further growth of AlxGa1âxN-based structures and devices. High Resolution Scanning Transmission Electron Microscopy (HR-STEM) and Convergent Beam Electron Diffraction (CBED) were employed for detailed structural analysis of AlGaN/GaAs (111)B interface and allowed us to determine the N-polarity of AlGaN layers grown on GaAs (111)B substrates. The novel, high efficiency RF plasma source allowed us to achieve free-standing AlxGa1âxN layers in a single day's growth, making this a commercially viable process.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 456, 15 December 2016, Pages 151-154
Journal: Journal of Crystal Growth - Volume 456, 15 December 2016, Pages 151-154
نویسندگان
S.V. Novikov, C.R. Staddon, S.-L. Sahonta, R.A. Oliver, C.J. Humphreys, C.T. Foxon,