Highly transparent ZnO bilayers by LP-MOCVD as front electrodes for thin-film micromorph silicon solar cells

► We prepare highly transparent and strongly light-diffusing ZnO bilayers by MO-LPCVD. ► Bilayers combine a highly doped nucleation part with a non-intentionally doped bulk part. ► Boron diffusion from the nucleation part is suspected to improve conductivity. ► Bilayer front electrodes enhance the current photo-generation in micromorph solar cells.