Microcrystalline silicon carbide window layers in thin film silicon solar cells

► Silicon thin film solar cells with highly transparent n-type μc-SiC:H window layer were studied. ► Structure of μc-Si:H absorber layer deposited on μc-SiC:H window layer was investigated. ► A thin seed layer of intrinsic μc-SiC:H is found to be necessary at the SiC/Si interface. ► Solar cells were optimized in terms of both seed layer and absorber layer. ► High short-circuit current density of 29.6 mA/cm2 was obtained within a 2-μm-thick cell.