کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
6595563 458533 2014 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Model predictive temperature tracking in crystal growth processes
ترجمه فارسی عنوان
مدل پیش بینی دمای ردیابی در فرایندهای رشد بلوری
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی مهندسی شیمی (عمومی)
چکیده انگلیسی
The temperature gradients and distribution evolution within the crystal domain in Czochralski crystal growth process have important role in produced crystal's quality. Precise and tight regulation of temperature distribution and gradients is the most promising approach to ensure the crystal quality. In this work, the coupled crystal pulling dynamics and heat transfer models in Czochralski crystal growth with a time-varying boundary is considered. The moving boundary finite element method is used to obtain the optimal reference temperature trajectory associated with the reference crystal shape taking into account constraints on input and the temperature gradients. The obtained reference trajectory is used to implement a model predictive control strategy to track the reference temperature despite uncertainties in crystal domain geometry evolution and disturbances. Finally, the proposed method is implemented on a high fidelity finite element process model with non-planar interface and results are presented to validate the success of the proposed methodology.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Computers & Chemical Engineering - Volume 71, 4 December 2014, Pages 323-330
نویسندگان
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