Research of micro area piezoelectric properties of AlN films and fabrication of high frequency SAW devices

Research of micro area piezoelectric properties of AlN films and fabrication of high frequency SAW devices

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 199, 5 November 2018, Pages 63-68

Fang Wang, Fuliang Xiao, Dianyou Song, Lirong Qian, Yulin Feng, Bangran Fu, Kaifei Dong, Can Li, Kailiang Zhang,