Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; Negative tone resist; Organic ice resist; Multilayer resist; 3D lithography;
مقالات ISI لیتوگرافی پرتو الکترونی (ترجمه نشده)
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در صورتی که به ترجمه آماده هر یک از مقالات زیر نیاز داشته باشید، می توانید سفارش دهید تا مترجمان با تجربه این مجموعه در اسرع وقت آن را برای شما ترجمه نمایند.
Keywords: لیتوگرافی پرتو الکترونی; Plasma etching; Aluminum oxide; Atomic layer deposition; Inductively coupled plasma; Electron beam lithography; Deep UV lithography;
Keywords: لیتوگرافی پرتو الکترونی; Nanofabrication; Electron beam lithography; Reactive ion etching; Metrology;
Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; Reactive ion etching; Titanium; Direct patterning; Submicron; Bone implants;
Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; Atomic layer deposition; Fresnel zone plates (FZP); Efficiency measurement; Line-doubled;
Micro-contacted self-assembled tungsten oxide nanorods for hydrogen gas sensing
Keywords: لیتوگرافی پرتو الکترونی; Gas sensor; Tungsten oxide; Hydrogen sensing; Nanorods; Nanofabrication; Electron beam lithography;
Keywords: لیتوگرافی پرتو الکترونی; Dose estimation; Monte Carlo simulation; Electron beam lithography;
Keywords: لیتوگرافی پرتو الکترونی; Pattern collapse; Photoresist; Developing; EUV interference lithography; EUV lithography; Electron beam lithography; HSQ; PMMA;
Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; Molecular resist; Chemically amplification; Electron beam energy;
Keywords: لیتوگرافی پرتو الکترونی; Nanofabrication; Electron beam lithography; Nanostructure; Nanoelectronics; Nanophotonics; Metamaterial;
Keywords: لیتوگرافی پرتو الکترونی; Micromembrane; LTA; Electron beam lithography; Secondary growth; Magnetoelastic;
Keywords: لیتوگرافی پرتو الکترونی; 2D/3D; two/three dimensional; AA; amino acid; AFM; atomic force microscope/microscopy; ATRP; atom transfer radical polymerization; BCA; bicinchoninic acid; bFGF; basic fibroblast growth factor; BSA; bovine serum albumin; CAM; cell adhesion molecule; CDI;
Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; Molecular dynamics; PMMA; Line edge roughness;
Keywords: لیتوگرافی پرتو الکترونی; Micro-fuel cell; Planar fuel cell; Electron beam lithography; Nafion patterning; PEMFC;
Keywords: لیتوگرافی پرتو الکترونی; Actin filament; Diagnostics; Electron beam lithography; Heavy meromyosin; Nanoseparation; Monte-Carlo simulation;
Keywords: لیتوگرافی پرتو الکترونی; Nanopore; Simulation; Electron beam lithography; Penelope; Nanotechnology; Monte Carlo;
Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; Self-assembled monolayer; Nanoparticle; Citrate;
Optimization of DyFe nanostructures using E-beam lithography for magneto-optical applications
Keywords: لیتوگرافی پرتو الکترونی; DyFe nanostructures; Magnetron sputtering; Electron beam lithography; Magnetic recording media;
Electron beam lithography on uneven resist for uniform Bragg gratings in GaSb based distributed-feedback lasers
Keywords: لیتوگرافی پرتو الکترونی; Distributed-feedback lasers; Electron beam lithography; Point spread function; Bragg grating; Uneven resist thickness;
Sub-10Â nm electron and helium ion beam lithography using a recently developed alumina resist
Keywords: لیتوگرافی پرتو الکترونی; Electron Beam Lithography; Helium FIB; Sol-gel based resist;
Optical properties and surface structuring of Ge20Sb5S75 amorphous chalcogenide thin films deposited by spin-coating and vacuum thermal evaporation
Keywords: لیتوگرافی پرتو الکترونی; Chalcogenide glass thin film; Spin-coating; Thermal evaporation; Electron beam lithography; Photolithography;
Research of micro area piezoelectric properties of AlN films and fabrication of high frequency SAW devices
Keywords: لیتوگرافی پرتو الکترونی; SAW; Aluminum nitride; (002) orientation; Piezoelectric properties; Electron beam lithography;
Germanium growth on electron beam lithography patterned Si3N4/Si(001) substrate using molecular beam epitaxy
Keywords: لیتوگرافی پرتو الکترونی; Molecular beam epitaxy; Electron beam lithography; Ge nanostructures; Residual stress;
Fabrication of CdMgTe/Cd(Mn)Te nanostructures with the application of high-resolution electron-beam lithography
Keywords: لیتوگرافی پرتو الکترونی; Nanopatterning; Electron beam lithography; Wet etching; Side gate;
A novel PMMA/NEB bilayer process for sub-20Â nm gold nanoslits by a selective electron beam lithography and dry etch
Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; PMMA/NEB bilayer; Reactive ion etching; Sub-20Â nm gold slits;
Hough Transform as a quality test tool for electron beam lithography
Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; Hough transform; Critical dimensional measurements;
Top-down SiGe nanostructures on Ge membranes realized by e-beam lithography and wet etching
Keywords: لیتوگرافی پرتو الکترونی; Ge membrane; Nanoscale etching; Wet-anisotropic etching; Electron beam lithography;
SnOx high-efficiency EUV interference lithography gratings towards the ultimate resolution in photolithography
Keywords: لیتوگرافی پرتو الکترونی; EUVL; Interference lithography; Sn-oxide based resist; Inorganic resist; Direct patterning; Sub-10Â nm resolution; Photolithography; Electron beam lithography;
Array of recessed gold nanoelectrodes formed with polymethylmethacrylate for individual detection of ascorbic acid, dopamine and uric acid
Keywords: لیتوگرافی پرتو الکترونی; Nanoelectrode array; Electron beam lithography; Polymethylmethacrylate; Electrochemical sensing; Electrostatic interaction;
Towards a novel positive tone resist mr-PosEBR for high resolution electron-beam lithography
Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; Resist material; Positive tone; High resolution; Nanopatterning;
Fabrication of eight-step diffractive optical element for hologram-ROM
Keywords: لیتوگرافی پرتو الکترونی; Nanoimprint; Electron beam lithography; Diffractive optical element; Hologram-ROM; Inorganic EB resist;
E-Beam lithography designed substrates for surface enhanced Raman spectroscopy
Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; Surface enhanced Raman spectroscopy; Nano-cone; Nano-ring; Bowtie; Fractal;
Fully CMOS-compatible top-down fabrication of sub-50Â nm silicon nanowire sensing devices
Keywords: لیتوگرافی پرتو الکترونی; Silicon nanowire sensor; Field effect transistor; Junctionless nanowire transistor; Top-down nanofabrication; Electron beam lithography; HSQ;
Microbowl-arrayed surface generated by EBL of negative-tone SU-8 for highly adhesive hydrophobicity
Keywords: لیتوگرافی پرتو الکترونی; EBL; electron beam lithography; CA; contact angle; CAH; contact angle hysteresis; PDMS; polydimethylsiloxane; PMMA; polymethylmethacrylate; PGMEA; propylene glycol methyl ether acetate; PEB; post-exposure baking; ICP-CVD; inductive coupling plasma-chemica
PSF calibration patterns selection based on sensitivity analysis
Keywords: لیتوگرافی پرتو الکترونی; Model calibration; Sensitivity analysis; PSF; E-beam proximity effect correction; Calibration patterns; Electron beam lithography; Electron microscopy; Point spread function; Global sensitivity analysis;
High molecular weight polystyrene as very sensitive electron beam resist
Keywords: لیتوگرافی پرتو الکترونی; Nanofabrication; Nanolithography; Electron beam lithography; Resist; Polystyrene;
Fabrication and characterization of a nanoantenna-based Raman device for ultrasensitive spectroscopic applications
Keywords: لیتوگرافی پرتو الکترونی; Nanoantenna; Electron beam lithography; Surface plasmon resonances; Near-field enhancement; SERS;
Benchmark test of Monte-Carlo simulation for high resolution electron beam lithography
Keywords: لیتوگرافی پرتو الکترونی; Electron Beam Lithography; Proximity Effect; PEC; Monte Carlo Simulation;
Magnetic dipolar coupling and collective effects for binary information codification in cost-effective logic devices
Keywords: لیتوگرافی پرتو الکترونی; Magnetic Quantum Cellular Automata; Magnetic Force Microscope; Thin Films; Electron Beam Lithography;
The fabrication of 3-D nanostructures by a low- voltage EBL
Keywords: لیتوگرافی پرتو الکترونی; Three-dimensional (3-D) nano structure; Electron beam lithography; Low voltage; Nano imprint lithography (NIL); PDMS;
Short-channel nanowire transistor using a nanoporous crystal semiconductor 12CaO·7Al2O3
Keywords: لیتوگرافی پرتو الکترونی; 12CaO·7Al2O3; Nanowire; Electron beam lithography; Field-effect transistor;
Comparison of the top-down and bottom-up approach to fabricate nanowire-based silicon/germanium heterostructures
Keywords: لیتوگرافی پرتو الکترونی; Silicon nanowires; Molecular beam epitaxy; Reactive ion etching; Si/Ge heterostructures; Wet chemical etching; Electron beam lithography;
Interconnection of specific nano-objects by electron beam lithography - A controllable method
Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; Molecular electronics; Nanotechnology;
Effect of nanostructuration on the magnetic properties of CoPt films
Keywords: لیتوگرافی پرتو الکترونی; Alloys; Electron beam lithography; Ion etching; Perpendicular magnetic anisotropy; Nanostructuration; Nucleation;
A systematic study of dry etch process for profile control of silicon tips
Keywords: لیتوگرافی پرتو الکترونی; Ultra sharp tips; Dry etch; Electron beam lithography; Nanoimprint lithography;
Fabrication of ultra-thin-film SOI transistors using the recessed channel concept
Keywords: لیتوگرافی پرتو الکترونی; SOI MOSFET; Thin film SOI; Recessed channel; Reactive ion etching; Electron beam lithography;
Comparative study of calixarene and HSQ resist systems for the fabrication of sub-20Â nm MOSFET device demonstrators
Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; Resist; Calixarene; HSQ;
Nanofabrication of protein-patterned substrates for future cell adhesion experiments
Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; Nanofabrication; Protein patterning; Self-assembling; Protein adsorption; Indium-tin-oxide;
Size-reduced silicon nanowires: Fabrication and electrical characterization
Keywords: لیتوگرافی پرتو الکترونی; Silicon nanowires; Size-reduction; Electrochemical etching of silicon; Hydrofluoric acid; Micro-electrochemical cell; Electron beam lithography;
Electron beam and mechanical lithographies as enabling factors for organic-based device fabrication
Keywords: لیتوگرافی پرتو الکترونی; Electron beam lithography; Mechanical lithography; Organic devices; Nanoelectronics;