Electron beam lithography on uneven resist for uniform Bragg gratings in GaSb based distributed-feedback lasers

Electron beam lithography on uneven resist for uniform Bragg gratings in GaSb based distributed-feedback lasers

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 195, 5 August 2018, Pages 32-35

Jianan Deng, Jinyi Yan, Jinhai Shao, Yifang Chen, Qian Gong,