Room-temperature bonding of single-crystal diamond and Si using Au/Au atomic diffusion bonding in atmospheric air

Room-temperature bonding of single-crystal diamond and Si using Au/Au atomic diffusion bonding in atmospheric air

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 195, 5 August 2018, Pages 68-73

Takashi Matsumae, Yuichi Kurashima, Hitoshi Umezawa, Yoshiaki Mokuno, Hideki Takagi,