کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
6942453 1450290 2018 16 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Seamless tool fabrication for Roll-to-Roll microreplication
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Seamless tool fabrication for Roll-to-Roll microreplication
چکیده انگلیسی
Roll-to-Roll microreplication combines the precision of hot embossing with continuous cost efficient replication on polymer films on large scale. For a viable realisation of this process, the main challenge for Roll-to-Roll hot embossing is the transfer from conventional flat silicon based micro structuring technology, to curved, large scale surfaces on continuously working rolls. This article presents lithography and electroplating based fabrication method of seamless microstructured sleeves and the Roll-to-Roll microreplication in a selection of high performance polymers like PEEK, LCP, PTFE, FEP, PSU and metal films such as aluminum and copper.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 194, 5 July 2018, Pages 8-14
نویسندگان
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