Surface and interfacial study of half cycle atomic layer deposited Al2O3 on black phosphorus

Surface and interfacial study of half cycle atomic layer deposited Al2O3 on black phosphorus

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 147, 1 November 2015, Pages 1-4

Hui Zhu, Xiaoye Qin, Angelica Azcatl, Rafik Addou, Stephen McDonnell, Peide D. Ye, Robert M. Wallace,