High throughput sub-10 nm metallic particles organization on templates made by block copolymer self-assembly and nanoimprint

High throughput sub-10 nm metallic particles organization on templates made by block copolymer self-assembly and nanoimprint

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 141, 15 June 2015, Pages 155-159

Javier Arias-Zapata, Julien Cordeiro, Sophie Böhme, Cécile Girardot, Jérôme Garnier, Philippe Bézard, Konstantinos Ntetsikas, George Liontos, Apostolos Avgeropoulos, David Peyrade, Marc Zelsmann,