Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM

Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 112, December 2013, Pages 193-197

F. Lloret, D. Araújo, M.P. Villar, J.G. Rodríguez-Madrid, G.F. Iriarte, O.A. Williams, F. Calle,