A simple and novel method for the evaluation of adhesion properties between UV curable resin and stamp in UV-nanoimprint lithography (UV-NIL)

► A simple and novel method to evaluate the adhesion properties of UV curable resin for UV-NIL. ► The pull-off test between a stamp and UV curable resin. ► The effect of the process conditions on the pull-off force. ► This test method can be useful to select the materials and the process conditions for UV-NIL.