کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
6944313 1450383 2012 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Effect of retaining ring slot designs and polishing conditions on slurry flow dynamics at bow wave
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Effect of retaining ring slot designs and polishing conditions on slurry flow dynamics at bow wave
چکیده انگلیسی
► Bow wave slurry film thickness was measured using ultraviolet enhanced fluorescence technique. ► Two polyetheretherketone (PEEK) retaining rings were tested under different polishing conditions. ► PEEK-1 generated thicker slurry film than PEEK-2. ► Film thickness increased with flow rate and ring pressure and decreased with sliding velocity for PEEK-1. ► Film thickness did not change significantly for PEEK-2.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 98, October 2012, Pages 70-73
نویسندگان
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