Fabrication of optimized 3D microstructures with undercuts in fused silica for replication

► Fabrication of inclined undercut 3D structures in fused silica by fluorocarbon gas RIBE. ► The structures inclination is selectable by the ion beam and substrate rotation angle. ► The sequential etching influences the polymer deposition silica etching mechanism. ► Symmetric and smooth patterns can be achieved with short etching cycles. ► The structures can be used for micromechanics immediately or after replication.