Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures

► Homogeneous periodic nano-cone arrays are created by FIB milling. ► For planar Si, a very simple and efficient patterning method is demonstrated. ► Arrays can be scaled without change of homogeneity. ► Cone shape can be varied by proper choice of beam current. ► For protruded samples, patterning strategy is adapted by proper dwell time variation.