Improving the lifespan of the cantilever during electron assisted AFM lithography

► With the Pt-coated cantilever, we patterned on the Optool DSX (0.1%) surface by electron assisted AFM lithography. ► The delineated distance of the line pattern was 2000 μm (= 2 mm). ► The line width remained constant at 60 nm from start to finish. ► The lifespan of the cantilever was improved by more than 8 times. ► Electron assisted AFM lithography provides a simple, low-cost nano-imprint lithography mold fabrication.