Fabrication of porous material for micro component application by direct X-ray lithography and sintering

► We do X-ray exposure to the feedstock contains Steel powder and SU-8 photoresist. ► Development process succeeds to separate exposed and non-exposed area of SU-8. ► TGA analysis of SU-8 was examined to find the optimum debinding parameter. ► Sintering process in low temperature will promote necking and pores formation. ► A remain SU-8 still exist in the center of cross section area from sintered sample.