TCAD simulation of SOI TFETs and calibration of non-local band-to-band tunneling model

► We report a simulation study of the non-local tunneling model applied to Tunnel FET. ► An algorithm to calibrate the non-local tunneling model with experiments is shown. ► Reduced mass is used as the only fitting parameter. ► Transverse optical phonon is used in the calculation for consistency with simulator. ► The tunneling generation rates for different crystal directions are calculated.