کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
6944760 1450391 2012 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Sensitivity study of surface stress biosensors based on ultrathin Si membranes
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Sensitivity study of surface stress biosensors based on ultrathin Si membranes
چکیده انگلیسی
A study on the design of membrane based bimorph structures that can be used for the development of surface stress biosensors is presented. At first, the finite element analysis of cantilever based biosensors is evaluated utilizing analytical equations and published experimental results. The model that is selected simulates successfully the cantilevers' behavior and can be further expanded to more complicated structures. Therefore, we study the sensitivity of the membrane based surface stress biosensors and the effect that their geometrical parameters have on the sensor performance. Although membranes are less sensitive than the cantilevers, they attain interest in biological sensing because they can be used with capacitive readout, and thus have the potential for miniaturized sensor arrays. Based on the simulation results, we reveal the structure characteristics that should be considered in the design of the biosensors in the case of flat Si membranes.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 90, February 2012, Pages 29-32
نویسندگان
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