کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7117572 | 1461363 | 2018 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Super-resolution GaAs nano-structures fabricated by laser direct writing
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موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Nanostructures have been applied in various semiconductor devices. However, current nanostructure fabrication technologies always have such or that shortages, stimulating a need for new technology with simple fabrication, high efficiency and low cost. In this paper, we present super-resolution nanostructure fabrication based on laser ablation effects by using laser direct writing technique. GaAs nanostructures including nano-holes, nano-grooves and gratings have been fabricated. The depths and full widths at half maximum of nano-grooves show linear dependence on laser power and pulse duration. The minimum full width at half maximum of grating groove reaches to 32â¯nm, which is nearly 1/10 to diameter of focused laser spot. The results demonstrate the capacity of laser direct writing technique and provide a simple means for super-resolution nanofabrication.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 84, September 2018, Pages 119-123
Journal: Materials Science in Semiconductor Processing - Volume 84, September 2018, Pages 119-123
نویسندگان
Wei Zhang, Zhenwu Shi, Chen Chen, Xinning Yang, Linyun Yang, Zhongming Zeng, Baoshun Zhang, Qian Liu,