کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7117662 | 1461366 | 2018 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Performance of thin AlxOy, SixNy and AlN passivation layers for high temperature SAW device applications
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موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
This paper investigates the potential of passivation coatings for surface acoustic wave devices (SAW) based on aluminum nitride as a piezoelectric layer to operate at temperatures up to 1000â¯Â°C and in pure oxygen atmosphere. To increase the durability of SAW devices, a thin passivation layer was deposited on top of the structure, consisting of either aluminum nitride, alumina or silicon nitride. To investigate the effectivity of the passivation layer as oxygen diffusion barrier, time resolved X-ray diffraction (XRD) measurements were performed at 1000â¯Â°C in pure oxygen atmosphere for up to 24â¯h. Furthermore, the influence of an additional layer on top of the structure on the SAW performance were examined. Therefore, samples were measured before and after the deposition process. Afterwards, the samples were placed in a furnace in pure oxygen atmosphere to test the robustness of the different layers.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 81, July 2018, Pages 1-6
Journal: Materials Science in Semiconductor Processing - Volume 81, July 2018, Pages 1-6
نویسندگان
M. Gillinger, T. Knobloch, A. MarkoviÄ, G. Pfusterschmied, M. Schneider, U. Schmid,