کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7118101 1461373 2018 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Structural and optical properties of Ni-embedded hydrogenated diamond-like carbon (Ni-DLC) prepared by co-deposition of RF-Sputtering and RF-PECVD method
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Structural and optical properties of Ni-embedded hydrogenated diamond-like carbon (Ni-DLC) prepared by co-deposition of RF-Sputtering and RF-PECVD method
چکیده انگلیسی
(RF-PECVD) from acetylene gas and nickel target in various RF powers. The structural and optical properties of thin films with increasing nickel content were investigated. X-Ray Diffraction (XRD) study shows completely an amorphous structure. The presence of Ni and carbon content were confirmed by Energy dispersive X-ray (EDX) Spectra. The optical band gap energy decreases from 4.58 to 3.66 eV with increasing applied power. The Urbach energy displays a decreasing trend from 0.472 to 0.189 eV. It is shown that the Ni content and the size of nanoparticles could be controlled by adjusting RF applied power.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 74, February 2018, Pages 7-12
نویسندگان
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