کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
728241 | 1461399 | 2016 | 4 صفحه PDF | دانلود رایگان |
The amorphous InGaZnO (a-IGZO) thin film transistors (TFTs) with sputtered silver source/drain (S/D) and gate electrodes were investigated and developed. The sputtered single-film Ag was confirmed to be unfit for the electrodes of a-IGZO TFTs because of its bad contact with a-IGZO and atom diffusion into insulators. Accordingly the sputtered Mo films were proposed to serve as the capping layers, indicating that the 20-nm-thick Mo could effectively form ohmic contact with the a-IGZO, prevent the Ag diffusion into the SiOx, and make good adhesion to the glass substrates. The devices with multi-layer S/D and gate electrodes (Mo/Ag/Mo) were successfully fabricated, exhibiting the reasonably good performance and thus proving the application of the sputtered silver electrodes into a-IGZO TFTs was possible.
Journal: Materials Science in Semiconductor Processing - Volume 48, 15 June 2016, Pages 23–26