Synthesis and characterization of diamond-like carbon film on silicon by electrodeposition from solution of ethanol and methanol

Diamond-like carbon (DLC) films were prepared by electrodeposition technique on single crystalline n-type Si (100) substrates. Electrolysis of ethanol and methanol solution with different volume ratios at 60 °C under constant voltage of 1200 V is presented. The DLC films were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), energy dispersive X-ray (EDX), Raman spectroscopy, and atomic force microscopy (AFM). The deposited DLC films composed of small and compact grains and seem to be uniform, smooth and homogeneous with a structure influenced by the amount of methanol. The EDX spectra of the prepared films indicated that carbon and oxygen are their main composition. The root mean square (RMS) roughness of the DLC films, synthesized from electrolytes containing 20 by volume of methanol, was 1.17 nm. Raman spectra of films showed the presence of a peak located at 1450 cm−1 in addition to G and D peaks which confirmed the formation of DLC film. These spectra confirmed the amorphous nature of all deposited DLC films.