کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
729023 1461438 2006 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Electron-beam-induced current imaging for the characterisation of structural defects in Si1−xGex films grown by LE-PECVD
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Electron-beam-induced current imaging for the characterisation of structural defects in Si1−xGex films grown by LE-PECVD
چکیده انگلیسی

We present a comparison of two different techniques for the evaluation of Threading Dislocation Density (TDD) in Si1−xGex graded buffers: chemical etching and Electron-Beam-Induced-Current (EBIC) imaging. The samples analyzed consist of a series of linearly graded Si1−xGex buffers terminated by a constant composition layer with Ge concentration varying between 0.2 and 0.9. The films were deposited on Si(1 0 0) wafers by means of Low Energy Plasma Enhanced CVD (LE-PECVD). Our results indicates that EBIC proves to be a versatile method, which provides reliable information on the defect concentration up to a   Ge concentration of x=0.4x=0.4. For higher values of x  (x=0.7)(x=0.7) the information is approximated but yet reliable for the purpose of optimising the growth process. In order to perform EBIC   measurements on samples with higher Ge concentrations (x=0.9)(x=0.9), the Schottky diode fabrication has to be improved.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 9, Issues 4–5, August–October 2006, Pages 798–801
نویسندگان
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