کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
729182 1461416 2015 13 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Evolution of surface morphology of alloyed AuGe/Ni/Au ohmic contacts to GaAs microwave FETs
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Evolution of surface morphology of alloyed AuGe/Ni/Au ohmic contacts to GaAs microwave FETs
چکیده انگلیسی

During post-deposition alloying of AuGe/Ni/Au ohmic contacts to microwave transistors, there is interdiffusion of alloy materials and GaAs into each other. Outdiffusion from substrate greatly influences the surface roughness of the contacts as a function of alloying temperature. During our experiments, we have observed that the RMS roughness of the contact surface followed the trend of contact resistance with alloying temperature. We seek to explain this evolution of surface morphology using a model involving the phenomena of coalescence and outdiffusion occurring simultaneously.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 30, February 2015, Pages 62–74
نویسندگان
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