Extraction of parasitic and channel resistance components in FinFETs using TCAD tools

• Practical method to extract channel and parasitic resistance in a FinFET device.
• Useful guide in designing FinFETs with minimized parasitic resistance.
• Provides a metric quantifying the current spreading in each region of the device.

A novel TCAD conductance integration method is presented to evaluate and extract the channel resistance as well as the three-dimensional (3D) parasitic resistance components in a FinFET device. It is shown that results with this method agree well with a well-known 3D analytical model and that the method accurately simulates the parasitic resistance of realistic 3D FinFETs. Furthermore, the method is shown to be an effective aid in designing FinFETs with minimized parasitic resistance. Finally, the method introduces a useful figure of merit (called βyβy) that quantifies precisely the amount of current spreading that occurs in each region of the device.