Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers

Lead zirconate titanate, Pb(Zr0.53,Ti0.47)O3 or PZT, thin films and integrated cantilevers have been fabricated for energy harvesting applications. The PZT films were deposited on PECVD SiO2/Si substrates with a sol–gel derived ZrO2 buffer layer. It is found that lead content in the starting solution and ramp rate during film crystallization are critical to achieving large-grained films on the ZrO2 surface. The electrical properties of the PZT films were measured using metal–ferroelectric–metal and inter-digital electrode structures, and revealed substantial improvement in film properties by controlling the process conditions. Functional cantilevers are demonstrated using the optimized films with output of 1.4 V peak-to-peak at 1 kHz and 2.5 g.

► Thin film and cantilever processes have been developed to harvest energy from vibration.
► A 1.4 Vp-p was extracted from mechanical vibrations at 1 kHz and 2.5 g.
► Fabrications of PZT cantilever trough a wet/dry etch process.
► Optimization of the piezoelectric thin films properties to yield the piezoelectric desired phase and morphology on cantilevers.