کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
753581 | 1462268 | 2006 | 5 صفحه PDF | دانلود رایگان |
The impact of halo implantation angle on the low-frequency noise of short channel n-MOSFET is reported. The low-frequency noise is degraded with larger tilt angle for the same implant dose and energy. The higher dose/energy of the halo implant with larger tilt angle further enhances the degradation of low-frequency noise. The larger halo angle introduces non-uniform doping distribution and creates the non-uniform threshold voltage along the channel. Additional traps can be created near the oxide/semiconductor interface due to boron pileup due to larger tilt angle. A quantitative analysis supported by experimental results confirm that the degradation of 1/f noise is due to the combined effect of non-uniformity in threshold voltage along the channel and the creation of extra trap charges near the oxide-semiconductor interface (near-interfacial charges).
Journal: Solid-State Electronics - Volume 50, Issues 11–12, November–December 2006, Pages 1705–1709