A Cantilever Array Sensor Platform Guided by Optical Fibers and Its Sensing Application

A cantilever array sensor platform was developed based on the optical lever method, and cantilever array chip was also fabricated. The cantilevers were consistent to temperature response; the deviations of cantilevers' temperature change response sensitivity were no more than 5.0%. Hg2+ was detected by the sensor in aqueous solution concentration in the range of 1-200 ng mL−1.