Molecular precursor approach to metal oxide and pnictide thin films

► Precursor synthesis and thin film deposition for metal oxides and pnictides. ► Preliminary mechanistic studies for the decomposition of metal alkoxides. ► A comparison of precursors used in different methodologies. ► Modified alkoxides have been shown to provide more stability. ► Aerosol-assisted CVD addresses the delivery problems associated with single-source precursors.