A facile synthesis of silicon nanowires/micropillars structure using lithography and metal-assisted chemical etching method

A novel fabrication method for the silicon nanowires/micropillars structure has been proposed. This method is using lithography and metal-assisted chemical etching to fabricate silicon nanowires/micropillars structure. In the experiment, to obtain the optimal light trapping property of the silicon nanowires/micropillars structure, the optimal light trapping properties of silicon nanowires were systemically investigated. And then, large-area uniform, controllable and optimal light trapping silicon nanowires/micropillars structure was fabricated using the lithography and metal-assisted chemical etching method.317