Electrochemical properties of Li[Li0.2Mn0.54Co0.13Ni0.13]O2 cathode thin film by RF sputtering for all-solid-state lithium battery

► High capacity thin films were deposited by RF magnetron sputtering. ► Sputtering conditions were optimized by structural and electrochemical analysis. ► Li[Li0.2Mn0.56Ni0.13Co0.13]O2 thin film shows a high capacity, 62 μAh/cm2 μm. ► The thin film shows an excellent cycling stability up to 200 cycles.