کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7881460 | 1509599 | 2014 | 11 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A study of the microstructure evolution of hard Zr-B-C-N films by high-resolution transmission electron microscopy
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: A study of the microstructure evolution of hard Zr-B-C-N films by high-resolution transmission electron microscopy A study of the microstructure evolution of hard Zr-B-C-N films by high-resolution transmission electron microscopy](/preview/png/7881460.png)
چکیده انگلیسی
Pulsed reactive magnetron sputtering was used to deposit Zr-B-C-N films as a function of the N2/Ar ratio in the plasma. The microstructure evolution of the films was studied by high-resolution transmission electron microscopy, X-ray photoelectron spectroscopy and nanoindentation. Zr-B-C-N films with a chemical composition (in at.% without 1-2 at.% H and < 1 at.% O and Ar) of Zr61B27C6N3, Zr41B30C8N20, Zr26B26C5N42 and Zr24B19C6N49 were produced using a nitrogen fraction of 0%, 5%, 10% and 15%. The Zr61B27C6N3 film consists of fcc B-rich Zr(B,C,N) nano-columnar structures concealed by an amorphous matrix. The fcc B-rich Zr(B,C,N) columns exhibit a preferred orientation with their [1 1 1] parallel to the film growth direction. The Zr41B30C8N20 film possesses the highest hardness and consists of nano-needle structures (â¼40 nm long and â¼10 nm wide) separated by amorphous boundaries. The nano-needles have a face-centered cubic (fcc) structure and are composed of ZrN and/or Zr(B,C,N) nano-domain structures (â¼2 nm) that are semi-coherently joined via Zr-N monolayer interfaces. The Zr26B26C5N42 film is composed mainly of refined crystalline ZrN nano-needle structures (â¼2 nm) embedded in an amorphous structure, and the Zr24B19C6N49 film has an amorphous-like structure. In the Zr41B30C8N20 film, the formation of ZrN and/or Zr(B,C,N) nano-domain structures, semi-coherently joined via Zr-N monolayer interfaces within the nano-needle structures, play a critical role in achieving high hardness and modulus. The annihilation of such a structure and the introduction of additional amorphous structure into the films by changing the N/Zr ratio via varying the N2 fraction in the gas mixture result in a significant decrease in the mechanical properties.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Acta Materialia - Volume 77, 15 September 2014, Pages 212-222
Journal: Acta Materialia - Volume 77, 15 September 2014, Pages 212-222
نویسندگان
Minghui Zhang, Jiechao Jiang, JiÅà HouÅ¡ka, JiÅà Kohout, Jaroslav VlÄek, Efstathios I. Meletis,