Multi-directional ultra-high sensitive pressure sensor based on the integration of optimized double 60° bend waveguides and modified center-defect photonic crystal microcavity

In the previous work [1], we have proposed a method to realize multi-directional pressure sensor. This follow-up work provides an optimized structure design based on the integration of double 60° bend waveguides and modified center-defect photonic crystal microcavity to further improve sensitivity. By applying two-dimensional finite difference time domain technologies (2D-FDTD) and finite-element methods (FEM), we systematically investigate the variations of optical properties under applied pressure. Linear relationships between the resonant wavelength shift and the applied pressure are obtained in three directions. The ultra-high sensitivities and the low minimum detectable pressure in longitudinal, transverse and upright directions are 39.7 nm/μN and 1.08 nN, 30.20 nm/μN and 1.43 nN, and 0.12 nm/nN and 0.36 nN respectively.