کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7938845 | 1513181 | 2018 | 48 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Thickness effects on physical and electrical properties of Zn0.97Co0.02In0.01O thin films grown by magnetron sputtering RF
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The effects of thickness on physical properties (structural, morphological, optical and electrical) of Zn0.97Co0.02In0.01O (CIZO) thin films with different thicknesses grown at room temperature were investigated in this study. Zn0.97Co0.02In0.01O thin films have been grown by Radio Frequency magnetron sputtering on glass substrate followed by a rapid annealing treatment at 400â¯Â°C for 10â¯min. X-ray diffraction (XRD) measurement display that the Zn0.97Co0.02In0.01O thin films exhibited hexagonal wurtzite phase with a preferred orientation along the c-axis. We observe a strong single peak corresponding to the (002) phase obvious on the diffractograms. The crystallite size values exhibit an increasing tendency and the dislocation density indicates a decreasing trend with increasing thickness, this shows that the material is relaxing. Concerning the SEM micrographs, it was observed that the average grain size increased from 20â¯nm to 80â¯nm, with thickness ranging from 150â¯nm to 450â¯nm. The roughness surface (RMS) measured by AFM increased from 4.309â¯nm to 11.392â¯nm with a rising thickness. Raman spectroscopy was used to study structural properties of complex oxides at a local level. All films were highly transparent in the visible region with an average transmittance of 96%. Growing the thickness enhance the optical band gap, from 3.106â¯eV to 3.439â¯eV. Optical parameters such as absorption coefficient, refractive index, dispersion parameters and dielectric constants were studied to investigate the influence of thickness on optical properties of Zn0.97Co0.02In0.01O thin films. The thickness improves the electrical resistivity of Zn0.97Co0.02In0.01O thin films. It has been found from electrical measurements that films with a thickness of 450â¯nm have the lowest resistivity of 2.9 10â3â¯Î©â¯cm. Once the merit factor determined, we noted that the 450â¯nm sample having a better TCO of value 12.2 103Ωâ1.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Superlattices and Microstructures - Volume 120, August 2018, Pages 670-689
Journal: Superlattices and Microstructures - Volume 120, August 2018, Pages 670-689
نویسندگان
H. Slimi, A. Barhoumi, N. Waldhoff, B. Duponchel, C. Poupin, R. Cousin, G. Leroy, S. Guermazi,