Polymer functionalized nanostructured porous silicon for selective water vapor sensing at room temperature

This paper highlights the surface treatment of porous silicon (PSi) for enhancing the sensitivity of water vapors at room temperature. A simple and low cost technique was used for fabrication and functionalization of PSi. Spin coated polyvinyl alcohol (PVA) was used for functionalizing PSi surface. Morphological and structural studies were conducted to analyze samples using SEM and XRD/Raman spectroscopy respectively. Contact angle measurements were performed for assessing the wettability of the surfaces. PSi and functionalized PSi samples were tested as sensors in presence of different analytes like ethanol, acetone, isopropyl alcohol (IPA) and water vapors in the range of 50-500 ppm. Electrical measurements were taken from parallel aluminium electrodes fabricated on the functionalized surface, using metal mask and thermal evaporation. Functionalized PSi sensors in comparison to non-functionalized sensors depicted selective and enhanced response to water vapor at room temperature. The results portray an efficient and selective water vapor detection at room temperature.