Improving the crack resistance and fracture toughness of Cu/Ru multilayer thin films via tailoring the individual layer thickness

Improving the crack resistance and fracture toughness of Cu/Ru multilayer thin films via tailoring the individual layer thickness

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 742, 25 April 2018, Pages 45-53

Qing Zhou, Shuang Zhang, Xuezi Wei, Fei Wang, Ping Huang, Kewei Xu,