کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7994448 | 1516158 | 2018 | 47 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Design of ceria grafted mesoporous silica composite particles for high-efficiency and damage-free oxide chemical mechanical polishing
ترجمه فارسی عنوان
طراحی ذرات کامپوزیتی سیلیکا مزوپور به طور قابل ملاحظه ای برای اکسترودرهای مکانیکی با راندمان بالا و بدون آسیب
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کلمات کلیدی
سیریا، سیلیسیوم مزوپور، ساختار هسته / پوسته، ذرات سایشی، ماشینکاری مکانیکی شیمیایی،
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فلزات و آلیاژها
چکیده انگلیسی
Chemical mechanical polishing or planarization (CMP) is a material removal process dominated by mechanical and tribo-chemical assisted friction and wear. The choice of abrasive plays a key role in this process. In this work, the mSiO2/CeO2 composite particles, consisting mesoporous silica (mSiO2) cores and CeO2 nanoparticle coatings, were designed and introduced into oxide chemical mechanical polishing (CMP) as novel abrasives. The abrasives were further characterized in terms of X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy (XPS), and scanning transmission electron microscopy-energy-dispersive X-ray spectroscopy (STEM-EDX) techniques. Five different abrasive systems were tested in the oxide CMP processes, and their performances were evaluated in terms of material removal rate (MRR) and surface roughness. Particularly, the effects of inner cores of composite abrasives were investigated by comparing mSiO2/CeO2 (meso-silica cores), sSiO2/CeO2 (solid-silica cores), and PS/CeO2 (solid-polystyrene cores). As confirmed by TEM and XPS, the mSiO2/CeO2 composite particles revealed an improved structural stability with respect to PS/CeO2 hybrids, resulting from the formation of Ce-O-Si chemical bonding between SiO2 and CeO2 after high-temperature calcination. Overall, the composite abrasives resulted in a decreased surface roughness and reduced mechanical damage after CMP due to the spring-like effect coming from the elastic component of the PS or the mSiO2 cores, compared with the conventional rigid inorganic ceria abrasives or the mixed compounds (mSiO2+CeO2). In addition, the mSiO2/CeO2 composites exhibited a comparable surface roughness (0.20 vs 0.18Â nm) and topographical variation with respect to PS/CeO2 hybrids. However, the material removal rate for the mSiO2/CeO2 abrasives (64Â nm/min) was about three times larger than that of the PS/CeO2 abrasives (19Â nm/min) under the same CMP conditions. The enhanced removal rate might be related to the improved crystallinity of CeO2 particles and the increased content of Ce3+ ions at the CeO2 surfaces.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 736, 5 March 2018, Pages 276-288
Journal: Journal of Alloys and Compounds - Volume 736, 5 March 2018, Pages 276-288
نویسندگان
Yang Chen, Changzhi Zuo, Zefeng Li, Ailian Chen,