کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8038232 | 1518330 | 2015 | 14 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Electron imaging with an EBSD detector
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کلمات کلیدی
ROIFSDBSDOIMXEDSPRIASEBSDFIBTKDSEIFpst-EBSDCCDSecondary electron imageSecondary electron - الکترون ثانویهTransmission Kikuchi diffraction - انتقال Kikuchi پراکندگیTem - این استFocused ion beam - باریکه یونی متمرکز یا بیمcharge couple device - دستگاه شارژ شارژelectron backscatter diffraction - روش پراش الکترون های به عقب رانده شدهStem - ساقهX-ray energy dispersive spectroscopy - طیف سنجی پراکنده انرژی اشعه ایکسWorking distance - فاصله کارframes per second - فریم بر ثانیهSEM - مدل معادلات ساختاری / میکروسکوپ الکترونی روبشیregion of interest - منطقه مورد نظرscanning electron microscope - میکروسکوپ الکترونی اسکنTransmission electron microscope - میکروسکوپ الکترونی انتقالscanning transmission electron microscope - میکروسکوپ الکترونی انتقال اسکنOrientation imaging microscopy - میکروسکوپ تصویربرداری جهتsed - وBEI - وقتی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Electron Backscatter Diffraction (EBSD) has proven to be a useful tool for characterizing the crystallographic orientation aspects of microstructures at length scales ranging from tens of nanometers to millimeters in the scanning electron microscope (SEM). With the advent of high-speed digital cameras for EBSD use, it has become practical to use the EBSD detector as an imaging device similar to a backscatter (or forward-scatter) detector. Using the EBSD detector in this manner enables images exhibiting topographic, atomic density and orientation contrast to be obtained at rates similar to slow scanning in the conventional SEM manner. The high-speed acquisition is achieved through extreme binning of the camera-enough to result in a 5Ã5 pixel pattern. At such high binning, the captured patterns are not suitable for indexing. However, no indexing is required for using the detector as an imaging device. Rather, a 5Ã5 array of images is formed by essentially using each pixel in the 5Ã5 pixel pattern as an individual scattered electron detector. The images can also be formed at traditional EBSD scanning rates by recording the image data during a scan or can also be formed through post-processing of patterns recorded at each point in the scan. Such images lend themselves to correlative analysis of image data with the usual orientation data provided by and with chemical data obtained simultaneously via X-Ray Energy Dispersive Spectroscopy (XEDS).
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultramicroscopy - Volume 148, January 2015, Pages 132-145
Journal: Ultramicroscopy - Volume 148, January 2015, Pages 132-145
نویسندگان
Stuart I. Wright, Matthew M. Nowell, René de Kloe, Patrick Camus, Travis Rampton,