کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8149978 | 1524404 | 2015 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Novel selective area growth (SAG) method for regularly arranged AlGaN nanocolumns using nanotemplates
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We have demonstrated a novel selective area growth (SAG) method based on rf-plasma-assisted molecular beam epitaxy for AlGaN nanocolumns using nanotemplates. The nanotemplates, which were prepared on a metal-organic chemical vapor deposition-GaN template, consisted of a triangular lattice of nanopillars with a lattice constant from 200 to 400Â nm. For nanopillars with a lattice constant of 400Â nm, the gap width between adjacent pillars was varied from 30 to 130Â nm. The well-controlled SAG of GaN nanocolumns was achieved on nanopillar arrays with gap widths of less than approximately 45Â nm. The beam shadowing effect, which was induced in the high-density nanopillar arrays with small gaps, was a key mechanism in the SAG. This gap width condition for SAG was satisfied for lattice constants from 200 to 400Â nm. Using the nanotemplate SAG technology, the SAG of AlGaN nanocolumn arrays was achieved for Al compositions of 0.13, 0.22, 0.43, and 1. Single-peak photoluminescence (PL) spectra of AlGaN were observed, whose wavelengths were close to the calculated bandgap wavelengths using the bandgaps of AlN (6.015Â eV) and GaN (3.39Â eV) and a bowing parameter of 0.98Â eV.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 425, 1 September 2015, Pages 316-321
Journal: Journal of Crystal Growth - Volume 425, 1 September 2015, Pages 316-321
نویسندگان
Koji Yamano, Katsumi Kishino, Hiroto Sekiguchi, Takao Oto, Akihiro Wakahara, Yoichi Kawakami,